Dual vacuum mode – TMP or roughing pump for in-situ cleaning of chambers and specimens in electron microscopes and vacuum chambers
For all your cleaning needs, the Evactron Zephyr includes a RF Plasma Radical Source (PRS), Table Top Controller/RF Generator with Automatic Pressure/RF Level Control, RS232 Computer Interface, Solid-state Micropirani Gauge, Cables, Instructions, and five-year limited warranty.
The Evactron Model 40 Zephyr provides pre-programmed automatic cleaning and is rack-mounted.
The Evactron Model 45 Zephyr features controls on the front panel and requires manual adjustments. This model is also rack-mounted.
GUI interface provided with both for PC communication with controllers.